Lanthanide N,N-Dimethylaminodiboranates: Highly Volatile Precursors for the Deposition of Lanthanide-Containing Thin Films
- 28 January 2010
- journal article
- research article
- Published by American Chemical Society (ACS) in Journal of the American Chemical Society
- Vol. 132 (7), 2106-2107
- https://doi.org/10.1021/ja9098005
Abstract
New lanthanide CVD precursors of stoichiometry Ln(H3BNMe2BH3)3 have been prepared, where Ln = La, Ce, Pr, Nd, Sm, Gd, Tb, Dy, Ho, Er, Tm, and Lu. The ligand is N,N-dimethylaminodiboranate, a new kind of multidentate borohydride. The structures of the Ln(H3BNMe2BH3)3 complexes are highly dependent on the size of the lanthanide ions: the coordination number decreases from Pr (CN = 14) to Sm (CN = 13) to Er (CN = 12) corresponding with the decrease in ionic radii. The Ln(H3BNMe2BH3)3 complexes are highly volatile and sublime at temperatures as low as 65 °C in vacuum. These complexes are useful CVD precursors; for example, Y(H3BNMe2BH3)3 has been used to deposit Y2O3 on silicon at 300 °C by CVD using water as a coreactant.Keywords
This publication has 33 references indexed in Scilit:
- Lanthanide-Containing Light-Emitting Organic-Inorganic Hybrids: A Bet on the FutureAdvanced Materials, 2009
- Anomalously large measured thermoelectric power factor in Sr1−xLaxTiO3 thin films due to SrTiO3 substrate reductionApplied Physics Letters, 2008
- Atomic Layer Deposition of Rare Earth OxidesPublished by Springer Science and Business Media LLC ,2006
- Rare-earth oxide thin films for gate dielectrics in microelectronicsJournal of Alloys and Compounds, 2006
- An MOCVD Approach to High‐k Praseodymium‐Based FilmsChemical Vapor Deposition, 2006
- Taking advantage of luminescent lanthanide ionsChemical Society Reviews, 2005
- High dielectric constant oxidesThe European Physical Journal Applied Physics, 2004
- Organo Lanthanide Metal Complexes for Electroluminescent MaterialsChemical Reviews, 2002
- Rare-earth elements in permanent magnets and superconducting compounds and alloys (except new high T c ceramics) as thin films, thin crystals and thinned bulk materialsJournal of Materials Science, 1991
- Critical survey of rare-earth borides: Occurrence, crystal chemistry and physical propertiesJournal of the Less Common Metals, 1985