Development of novel process for Ru CMP using ceric ammonium nitrate (CAN)-containing nitric acid
- 5 March 2004
- journal article
- Published by Elsevier BV in Applied Surface Science
- Vol. 228 (1-4), 410-417
- https://doi.org/10.1016/j.apsusc.2004.01.060
Abstract
No abstract availableKeywords
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