Synthesis of zirconium silicide in Zr thin film on Si and study of its surface morphology
- 23 May 2013
- journal article
- Published by Springer Science and Business Media LLC in Journal of Materials Science: Materials in Electronics
- Vol. 24 (10), 3634-3639
- https://doi.org/10.1007/s10854-013-1296-x
Abstract
No abstract availableKeywords
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