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An Interactive Computer Simulation of Heating and Cooling a Row of Silicon Wafers
Home
Publications
An Interactive Computer Simulation of Heating and Cooling a Row of Silicon Wafers
An Interactive Computer Simulation of Heating and Cooling a Row of Silicon Wafers
MT
M. A. Tavel
M. A. Tavel
EH
E. W. Hearn
E. W. Hearn
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1 May 1988
journal article
Published by
The Electrochemical Society
in
Journal of the Electrochemical Society
Vol. 135
(5)
,
1266-1271
https://doi.org/10.1149/1.2095948
Abstract
No abstract available
Cited by 7 articles