Integrated Microelectromechanical Gyroscopes
- 1 April 2003
- journal article
- Published by American Society of Civil Engineers (ASCE) in Journal of Aerospace Engineering
- Vol. 16 (2), 65-75
- https://doi.org/10.1061/(asce)0893-1321(2003)16:2(65)
Abstract
Microelectromechanical (MEMS) gyroscopes have wide-ranging applications including automotive and consumer electronics markets. Among them, complementary metal-oxide semiconductor-compatible MEMS gyroscopes enable integration of signal conditioning circuitry, multiaxis integration, small size, and low cost. This paper reviews various designs and fabrication processes for integrated MEMS gyroscopes and compares their performance. Operational principles and design issues of MEMS vibratory gyroscopes are also addressed.Keywords
This publication has 17 references indexed in Scilit:
- An integrated microelectromechanical resonant output gyroscopePublished by Institute of Electrical and Electronics Engineers (IEEE) ,2003
- A monolithic surface micromachined Z-axis gyroscope with digital outputPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- Post-CMOS processing for high-aspect-ratio integrated silicon microstructuresJournal of Microelectromechanical Systems, 2002
- Phase and Vibration Analysis for a CMOS-MEMS GyroscopeInternational Journal of Nonlinear Sciences and Numerical Simulation, 2002
- Vertical comb-finger capacitive actuation and sensing for CMOS-MEMSSensors and Actuators A: Physical, 2001
- A HARPSS polysilicon vibrating ring gyroscopeJournal of Microelectromechanical Systems, 2001
- Micromachined thermally based CMOS microsensorsProceedings of the IEEE, 1998
- A surface-acoustic-wave gyro sensorSensors and Actuators A: Physical, 1998
- Laminated high-aspect-ratio microstructures in a conventional CMOS processSensors and Actuators A: Physical, 1996
- Levitation of a micromachined rotor for application in a rotating gyroscopeElectronics Letters, 1995