Polysilicon mesoscopic wires coated by Pd as high sensitivity H2 sensors
- 1 March 2002
- journal article
- Published by Elsevier BV in Sensors and Actuators B: Chemical
- Vol. 83 (1-3), 175-180
- https://doi.org/10.1016/s0925-4005(01)01037-1
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- Molecular detection based on conductance quantization of nanowiresApplied Physics Letters, 2000
- High aspect ratio photo-assisted electro-chemical etching of silicon and its application for the fabrication of quantum wires and photonic band structuresPublished by Institution of Engineering and Technology (IET) ,1996
- Hydrogen sensitive mos-structures: Part 1: Principles and applicationsSensors and Actuators, 1981
- Fabrication of novel three-dimensional microstructures by the anisotropic etching ofIEEE Transactions on Electron Devices, 1978