Influence of DC magnetron sputtering parameters on the properties of amorphous indium zinc oxide thin film
- 24 November 2003
- journal article
- Published by Elsevier BV in Thin Solid Films
- Vol. 445 (1), 63-71
- https://doi.org/10.1016/j.tsf.2003.09.014
Abstract
No abstract availableKeywords
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