Amorphous silicon rich silicon nitride optical waveguides for high density integrated optics

1 January 2004

journal article
Published by Institution of Engineering and Technology (IET) in Electronics Letters

Vol. 40 (7), 419-421
https://doi.org/10.1049/el:20040308

Abstract

Amorphous silicon rich silicon nitride optical waveguides clad in silica are presented as a high-index contrast platform for high-density integrated optics. Performance of different cross-sectional geometries have been measured and are presented with regards to bending loss and insertion loss. A sample double ring add-drop filter is presented.

Keywords

INSERTION LOSS
AMORPHOUS SILICON RICH SILICON NITRIDE
HIGH DENSITY INTEGRATED OPTICS
BENDING LOSS
DOUBLE RING ADD DROP FILTER
OPTICAL WAVEGUIDES
SIN
HIGH INDEX CONTRAST PLATFORM

This publication has 3 references indexed in Scilit:

Nanotaper for compact mode conversion
Optics Letters, 2003
Vertically and laterally waveguide-coupled cylindrical microresonators in Si3N4 on SiO2 technology
Applied Physics B Laser and Optics, 2001
Optical Filter Design and Analysis
Published by Wiley ,1999

Cited by 20 articles