A micro-Pirani vacuum gauge based on micro-hotplate technology
- 14 February 2006
- journal article
- Published by Elsevier BV in Sensors and Actuators A: Physical
- Vol. 126 (2), 300-305
- https://doi.org/10.1016/j.sna.2005.10.016
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
- Miniaturized vacuum gaugesJournal of Vacuum Science & Technology A, 2004
- An integrated gas sensor technology using surface micro-machiningSensors and Actuators B: Chemical, 2002
- Comparison of different micromechanical vacuum sensorsSensors and Actuators A: Physical, 2000
- Process-dependent thin-film thermal conductivities for thermal CMOS MEMSJournal of Microelectromechanical Systems, 2000
- Micro-Pirani vacuum gaugeReview of Scientific Instruments, 1994