Low-Temperature Metal-Oxide Thin-Film Transistors Formed by Directly Photopatternable and Combustible Solution Synthesis
- 28 March 2013
- journal article
- Published by American Chemical Society (ACS) in ACS Applied Materials & Interfaces
- Vol. 5 (9), 3565-3571
- https://doi.org/10.1021/am302722h
Abstract
We investigated the formation of ultraviolet (UV)-assisted directly patternable solution-processed oxide semiconductor films and successfully fabricated thin-film transistors (TFTs) based on these films. An InGaZnO (IGZO) solution that was modified chemically with benzoylacetone (BzAc), whose chelate rings decomposed via a π–π* transition as result of UV irradiation, was used for the direct patterning. A TFT was fabricated using the directly patterned IGZO film, and it had better electrical characteristics than those of conventional photoresist (PR)-patterned TFTs. In addition, the nitric acid (HNO3) and acetylacetone (AcAc) modified In2O3 (NAc-In2O3) solution exhibited both strong UV absorption and high exothermic reaction. This method not only resulted in the formation of a low-energy path because of the combustion of the chemically modified metal-oxide solution but also allowed for photoreaction-induced direct patterning at low temperatures.Keywords
This publication has 20 references indexed in Scilit:
- High Mobility Indium Zinc Oxide Thin Film Field-Effect Transistors by Semiconductor Layer EngineeringACS Applied Materials & Interfaces, 2012
- Flexible metal-oxide devices made by room-temperature photochemical activation of sol–gel filmsNature, 2012
- Amorphous-InGaZnO4 Thin-Film Transistors with Damage-Free Back Channel Wet-Etch ProcessECS Solid State Letters, 2012
- Solution processing of transparent conductors: from flask to filmChemical Society Reviews, 2011
- Low-temperature fabrication of high-performance metal oxide thin-film electronics via combustion processingNature Materials, 2011
- Low-Temperature, High-Performance, Solution-Processed Indium Oxide Thin-Film TransistorsJournal of the American Chemical Society, 2011
- Low-temperature, high-performance solution-processed metal oxide thin-film transistors formed by a ‘sol–gel on chip’ processNature Materials, 2010
- Polymeric Acrylate-Based Hybrid Films Containing Lead and Iron Patterned by UV Photo-PolymerizationLangmuir, 2009
- UV curing of organic–inorganic hybrid coating materialsJournal of Sol-Gel Science and Technology, 2007
- Large Area Electronics Using Printing MethodsProceedings of the IEEE, 2005