Synergetic effect of H2O2 and glycine on cobalt CMP in weakly alkaline slurry
- 1 June 2014
- journal article
- Published by Elsevier BV in Microelectronic Engineering
- Vol. 122, 82-86
- https://doi.org/10.1016/j.mee.2014.02.002
Abstract
No abstract availableKeywords
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