NH3 effect on the growth of carbon nanotubes on glass substrate in plasma enhanced chemical vapor deposition
- 1 April 2002
- journal article
- Published by Elsevier BV in Thin Solid Films
- Vol. 409 (1), 120-125
- https://doi.org/10.1016/s0040-6090(02)00114-1
Abstract
No abstract availableKeywords
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