Hydrogen effect on atomic configuration of keV-ion-irradiated carbon

Abstract
The structure of ion-irradiated hydrogenated amorphous carbon and hydrogenated graphitic carbon films has been investigated by measuring the trigonal carbon fraction by optical measurements and the hydrogen concentration by elastic recoil of 2.0-MeV He+ ions. After irradiation both graphitic and amorphous carbon samples showed a unique relationship between the trigonal bonded carbon and the hydrogen fraction, regardless of the original film structure.