A Scalable Fabrication Process for Liquid Crystal-Based Uncooled Thermal Imagers
- 2 May 2016
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in Journal of Microelectromechanical Systems
- Vol. 25 (3), 479-488
- https://doi.org/10.1109/jmems.2016.2555246
Abstract
A novel sensor is being developed for a new uncooled imager technology that is scalable to large formats (tens of megapixels), which is greater than what is achieved by commercial microbolometer arrays. In this novel sensor, a liquid-crystal transducer is used to change a long-wavelength infrared scene into a visible image that can be detected using a conventional visible imager. This approach has the potential for making a more flexible thermal sensor that can be optimized for a variety of applications. In this paper, we describe the microfabrication processes required to create an array of sealed thermally isolated micro-cavities filled with liquid crystals to be used for an uncooled thermal imager. Experimental results from the fabricated arrays will also be discussed.Keywords
Funding Information
- Assistant Secretary of Defense for Research and Engineering through the Air Force Research Laboratory (FA8721-05-C-0002)
This publication has 17 references indexed in Scilit:
- Versatile alignment layer method for new types of liquid crystal photonic devicesJournal of Applied Physics, 2015
- Determination of actual surface azimuthal anchoring strength using a wedge-shaped liquid crystal cellOptics Letters, 2010
- Handbook of Optical MetrologyPublished by Taylor & Francis Ltd ,2009
- Photoalignment of Liquid Crystalline MaterialsPublished by Wiley ,2008
- Critical point drying and cleaning for MEMS technologyPublished by SPIE-Intl Soc Optical Eng ,1999
- Chiral nematic order in liquid crystals imposed by an engineered inorganic nanostructureNature, 1999
- Novel Method of Measuring Surface Torsional Anchoring Strength of Nematic Liquid CrystalsJapanese Journal of Applied Physics, 1996
- The etching of silicon with XeF2 vaporApplied Physics Letters, 1979
- The Temperature Sensitivity of the Selective Reflection by Cholesteric Mesophases and Its Possible LimitationsMolecular Crystals and Liquid Crystals, 1974
- Solid Surface Shape and the Alignment of an Adjacent Nematic Liquid CrystalPhysical Review Letters, 1972