Raising of ozone formation efficiency in a homogeneous glow discharge plasma at atmospheric pressure

Abstract

Ozone formation efficiencies in a homogeneous glow discharge at atmospheric pressure have been measured and compared with that in a filamentary silent electric discharge, which is the usual ozone generation method. The ozone efficiencies in the homogeneous glow clearly increased to about 10% in air and to a maximum of 15% in oxygen. This increase is attributed to better collision efficiency among electrons and molecules, and to a lower increase in temperature than in discharge filaments of a silent electric discharge.