Effect of the substrate temperature on the physical characteristics of amorphous carbon films deposited by d.c. magnetron sputtering
- 31 December 1996
- journal article
- Published by Elsevier BV in Diamond and Related Materials
- Vol. 5 (12), 1509-1515
- https://doi.org/10.1016/s0925-9635(96)00575-4
Abstract
No abstract availableKeywords
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