Response of a SiC photodiode to extreme ultraviolet through visible radiation
- 1 December 2005
- journal article
- Published by Optica Publishing Group in Optics Letters
- Vol. 30 (23), 3120-3122
- https://doi.org/10.1364/ol.30.003120
Abstract
The responsivity of a type 6H–SiC photodiode in the wavelength range was measured using synchrotron radiation. The responsivity was at and was less than in the extreme ultraviolet (EUV) region. The responsivity was calculated using a proven optical model that accounted for the reflection and absorption of the incident radiation and the variation of the charge collection efficiency (CCE) with depth into the device. The CCE was determined from the responsivity measured in the wavelength range. By use of this CCE and the effective pair creation energy determined from x-ray absorption measurements, the EUV responsivity was accurately modeled with no free parameters. The measured visible-light sensitivity, although low compared with that of a silicon photodiode, was surprisingly high for this wide bandgap semiconductor.
Keywords
This publication has 9 references indexed in Scilit:
- GOES solar EUV detector calibration at the NSLSPublished by SPIE-Intl Soc Optical Eng ,2004
- 4H-SiC UV photo detectors with large area and very high specific detectivityIEEE Journal of Quantum Electronics, 2004
- Wide-bandgap semiconductor ultraviolet photodetectorsSemiconductor Science and Technology, 2003
- Study of silicon carbide for X-ray detection and spectroscopyIEEE Transactions on Nuclear Science, 2003
- Metrology of pulsed radiation for 157-nm lithographyApplied Optics, 2002
- Responsivity model for a silicon photodiode in the extreme ultravioletPublished by SPIE-Intl Soc Optical Eng ,2000
- 6H-Silicon Carbide Light Emitting Diodes and UV Photodiodesphysica status solidi (a), 1997
- Measurement of the mean electron-hole pair creation energy in crystalline silicon for photons in the 50–1500 eV spectral rangeApplied Physics Letters, 1996
- Silicon carbide UV photodiodesIEEE Transactions on Electron Devices, 1993