Capacitive nanoelectromechanical switch based on suspended carbon nanotube array
- 6 December 2010
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 97 (23), 233508
- https://doi.org/10.1063/1.3525165
Abstract
We present the fabrication and high frequency characterization of a capacitive nanoelectromechanical system(NEMS) switch using a dense array of horizontally aligned single-wall carbon nanotubes(CNTs). The nanotubes are directly grown onto metal layers with prepatterned catalysts with horizontal alignment in the gas flow direction. Subsequent wetting-induced compaction by isopropanol increases the nanotube density by one order of magnitude. The actuation voltage of 6 V is low for a NEMSdevice, and corresponds to CNT arrays with an equivalent Young’s modulus of 4.5–8.5 GPa, and resistivity of under 0.0077 Ω ⋅ cm . The high frequency characterization shows an isolation of −10 dB at 5 GHz.Keywords
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