Micromachined Thin-Film Mirror Array for Reflective Light Modulation
- 1 January 1997
- journal article
- Published by Elsevier BV in CIRP Annals
- Vol. 46 (1), 455-458
- https://doi.org/10.1016/s0007-8506(07)60864-6
Abstract
No abstract availableThis publication has 2 references indexed in Scilit:
- Surface-Micromachined Beams Without Spring Effect of Anchor Step-UpPublished by Transducer Research Foundation Inc. (TRF) ,1996
- Theoretical modeling of microfabricated beams with elastically restrained supportsJournal of Microelectromechanical Systems, 1993