MoS 2 transistors with 1-nanometer gate lengths

Abstract
A flatter route to shorter channels: High-performance silicon transistors can have gate lengths as short as 5 nm before source-drain tunneling and loss of electrostatic control lead to unacceptable leakage current when the device is off. Desai et al. explored the use of MoS 2 as a channel material, given that its electronic properties as thin layers should limit such leakage. A transistor with a 1-nm physical gate was constructed with a MoS 2 bilayer channel and a single-walled carbon nanotube gate electrode. Excellent switching characteristics and an on-off state current ratio of ∼10 6 were observed. Science , this issue p. 99
Funding Information
  • U.S. Department of Energy (DE-AC02-05CH11231)
  • Applied Materials, Inc.
  • Entegris, Inc.
  • I-RiCE program
  • Office of Naval Research BRC
  • NRI SWAN Center and Chinese Academy of Sciences President's International Fellowship Initiative (2015VTA031)