Laterally oscillated and force-balanced micro vibratory rate gyroscope supported by fish-hook-shaped springs
- 1 January 1998
- journal article
- Published by Elsevier BV in Sensors and Actuators A: Physical
- Vol. 64 (1), 69-76
- https://doi.org/10.1016/s0924-4247(97)01656-7
Abstract
No abstract availableKeywords
This publication has 1 reference indexed in Scilit:
- Design, fabrication, and operation of submicron gap comb-drive microactuatorsJournal of Microelectromechanical Systems, 1992