Sub-degree-per-hour silicon MEMS rate sensor with 1 million Q-factor
- 1 June 2011
- conference paper
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE)
- p. 2809-2812
- https://doi.org/10.1109/transducers.2011.5969216
Abstract
We report characterization of a silicon MEMS rate gyroscope with measured sub-deg/hr bias stability, enabled by the quality factor (Q) of 1.1 million. The rate sensor utilizes degenerate, dynamically balanced Quadruple Mass Gyroscope (QMG) design, which suppresses substrate energy dissipation and maximizes Q-factors. We demonstrated a 0.9°/hr in-run bias stability and a 0.06°/√hr rate noise density for the 0.1 mTorr vacuum packaged QMG with a 0.2 Hz mode-mismatch between drive- and sense-modes. This level of noise allowed detection of azimuth with 150 mrad precision, showing feasibility of a QMG for gyrocompassing.Keywords
This publication has 5 references indexed in Scilit:
- Micromachined rate gyroscope architecture with ultra-high quality factor and improved mode orderingSensors and Actuators A: Physical, 2011
- Ultra-high Q silicon gyroscopes with interchangeable rate and whole angle modes of operationPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2010
- Development of a MEMS gyroscope for northfinding applicationsPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2010
- Temperature Dependence of Quality Factor in MEMS ResonatorsJournal of Microelectromechanical Systems, 2008
- High frequency XYZ-axis single-disk silicon gyroscope2008 IEEE 21st International Conference on Micro Electro Mechanical Systems, 2008