A detailed investigation has been made of the properties of films deposited on amorphous glass substrates by the technique of spray pyrolysis. The variation of the electrical transport properties of these films as a function of substrate temperature has been correlated with variations in orientation, cubic/hexagonal phase ratio, and morphology. Additional effects of cooling rate, spraying rate, heat‐treatment in hydrogen, and variations in substrate are also considered. By heat‐treatment in hydrogen it is possible to produce films on amorphous glass substrates with an electron density in excess of 1018cm−3 and an electron mobility of 90 cm2/V‐sec at 300°K.