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Capillary Force Lithography
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Publications
Capillary Force Lithography
Capillary Force Lithography
KS
K. Y. Suh
K. Y. Suh
YK
Y. S. Kim
Y. S. Kim
H. H. Lee
H. H. Lee
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5 September 2001
journal article
research article
Published by
Wiley
in
Advanced Materials
Vol. 13
(18)
,
1386-1389
https://doi.org/10.1002/1521-4095(200109)13:18<1386::aid-adma1386>3.0.co;2-x
Abstract
No abstract available
Keywords
BLOCK COPOLYMERS
LITHOGRAPHY, CAPILLARY FORCE
POLYSTYRENE
SURFACE PATTERNING
Cited by 413 articles