Utilizing of hydrocarbon contamination for prevention of the surface charge-up at electron-beam assisted chemical etching of a diamond chip
- 1 January 1997
- journal article
- Published by Elsevier BV in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 121 (1), 507-509
- https://doi.org/10.1016/s0168-583x(96)00449-1
Abstract
No abstract availableKeywords
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