Oxidation of Silicon, Silicon Carbide, and Silicon Nitride in Gases Containing Oxygen and Chlorine
- 1 June 1993
- journal article
- Published by Wiley in Journal of the American Ceramic Society
- Vol. 76 (6), 1621-1623
- https://doi.org/10.1111/j.1151-2916.1993.tb03952.x
Abstract
No abstract availableKeywords
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