Low-k Interlayer Dielectric Materials: Synthesis and Properties of Alkoxy-Functional Silsesquioxanes
- 15 April 2005
- journal article
- Published by American Chemical Society (ACS) in Chemistry of Materials
- Vol. 17 (10), 2520-2529
- https://doi.org/10.1021/cm048993d
Abstract
No abstract availableThis publication has 23 references indexed in Scilit:
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