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Selective Wet Etching of High-k Gate Dielectrics
Home
Publications
Selective Wet Etching of High-k Gate Dielectrics
Selective Wet Etching of High-k Gate Dielectrics
KC
Kurt K. Christenson
Kurt K. Christenson
BS
Brent Schwab
Brent Schwab
TW
Thomas J. Wagener
Thomas J. Wagener
BR
Bruce Rosengren
Bruce Rosengren
DR
Deborah J. Riley
Deborah J. Riley
JB
Joel Barnett
Joel Barnett
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1 May 2003
journal article
Published by
Trans Tech Publications, Ltd.
in
Solid State Phenomena
Vol. 92
,
129-131
https://doi.org/10.4028/www.scientific.net/ssp.92.129
Abstract
No abstract available
Keywords
ETCH
HFO2
HIGH-K
SILICATE
ZRO2
Cited by 5 articles