Conductance statistics of small-area ohmic contacts on GaAs
- 28 May 1990
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 56 (22), 2216-2218
- https://doi.org/10.1063/1.102971
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
- Resistance of very small area ohmic contacts on GaAsApplied Physics Letters, 1989
- Dry etching induced damage on vertical sidewalls of GaAs channelsJournal of Vacuum Science & Technology B, 1988
- Effects of interfacial microstructure on uniformity and thermal stability of AuNiGe ohmic contact to n-type GaAsJournal of Applied Physics, 1987
- Electron microscope studies of an alloyed Au/Ni/Au-Ge ohmic contact to GaAsJournal of Applied Physics, 1983
- Alloyed ohmic contacts to GaAsJournal of Vacuum Science and Technology, 1981