Adaptive Control of A Class of Uncertain Electrostatic Microactuators
- 1 July 2007
- conference paper
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE) in American Control Conference (ACC)
- No. 07431619,p. 3186-3191
- https://doi.org/10.1109/acc.2007.4282686
Abstract
In this paper, adaptive state feedback control is presented for a class of single-degree-of-freedom (1DOF) electrostatic microactuator systems which can be actively driven in both directions. The control objective is to track a reference trajectory within the air gap without knowledge of the plant parameters. By a suitable change of coordinates, the system is represented in parametric strict feedback form, for which adaptive backstepping is performed to achieve asymptotic output tracking. To deal with the constrained position space, which precludes contact of the movable plate and the electrodes, special barrier functions are employed in Lyapunov synthesis. All closed loop signals are ensured to be bounded. Simulation studies demonstrate the effectiveness of the proposed control.Keywords
This publication has 12 references indexed in Scilit:
- Integrator Backstepping using Barrier Functions for Systems with Multiple State ConstraintsPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2006
- Open-loop versus closed-loop control of MEMS devices: choices and issuesJournal of Micromechanics and Microengineering, 2005
- Travel range extension of a MEMS electrostatic microactuatorIEEE Transactions on Control Systems Technology, 2004
- Control of an Electrostatic Microelectromechanical System Using Static and Dynamic Output FeedbackJournal of Dynamic Systems, Measurement, and Control, 2004
- Charge control of parallel-plate, electrostatic actuators and the tip-in instabilityJournal of Microelectromechanical Systems, 2003
- Adaptive tuning for vibrational gyroscopesPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2003
- Adaptive control for the conventional mode of operation of mems gyroscopesJournal of Microelectromechanical Systems, 2003
- Stabilization of electrostatically actuated mechanical devicesPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- Current drive methods to extend the range of travel of electrostatic microactuators beyond the voltage pull-in pointJournal of Microelectromechanical Systems, 2002
- Electrostatic micromechanical actuator with extended range of travelJournal of Microelectromechanical Systems, 2000