Photonic Damascene process for integrated high-Q microresonator based nonlinear photonics
Top Cited Papers
- 6 January 2016
- journal article
- research article
- Published by Optica Publishing Group in Optica
- Vol. 3 (1), 20-25
- https://doi.org/10.1364/optica.3.000020
Abstract
High confinement, integrated silicon nitride (SiN) waveguides have recently emerged as an attractive platform for on-chip nonlinear optical devices. The fabrication of high- SiN microresonators with anomalous group velocity dispersion has enabled broadband nonlinear optical frequency comb generation. Such frequency combs have been successfully applied in coherent communication and ultrashort pulse generation. However, the reliable fabrication of high confinement waveguides from stoichiometric, high stress SiN remains challenging. Here we present a novel photonic Damascene fabrication process enabling the use of substrate topography for stress control and thin film crack prevention. With close to unity sample yield we fabricate microresonators with 1.35 μm thick waveguides and optical -factors of and demonstrate single temporal dissipative Kerr soliton based coherent optical frequency comb generation. Our newly developed process is also interesting for other material platforms, photonic integration, and mid-infrared Kerr comb generation.
Keywords
Funding Information
- Defense Advanced Research Projects Agency (DARPA) (W31P4Q-14-C-0050)
- European Space Agency (ESA) (ESTEC CN 4000105962/12/NL/PA)
- Hasler Stiftung
- Marie Curie IIF
- Swiss National Science Foundation (SNSF)
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