Epitaxial CeO2 on Silicon Substrates and the Potential of Si/CeO2/Si for SOI Structures
- 1 January 1997
- journal article
- Published by Springer Science and Business Media LLC in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- Electrical and Structural Properties of Annealed Epitaxial Ceo2 Films on Si(111) SubstratesMRS Proceedings, 1995
- Electrical characteristics of epitaxial CeO2 on Si(111)Applied Physics Letters, 1994
- Reaction and regrowth control of CeO2 on Si(111) surface for the silicon-on-insulator structureApplied Physics Letters, 1994
- Epitaxial CeO2 Growth on Si (111) for SOIMRS Proceedings, 1994