Sputtered Pt electrode structures with smoothly tapered edges by bi-layer resist lift-off
- 1 December 2015
- journal article
- Published by Elsevier BV in Thin Solid Films
- Vol. 597, 158-164
- https://doi.org/10.1016/j.tsf.2015.11.026
Abstract
No abstract availableKeywords
Funding Information
- BMBF
- ENIAC (16ES0225)
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