An experimental system combined with a micromachine and double-tilt TEM holder
- 1 October 2016
- journal article
- Published by Elsevier BV in Microelectronic Engineering
- Vol. 164, 43-47
- https://doi.org/10.1016/j.mee.2016.06.018
Abstract
No abstract availableKeywords
Funding Information
- KAKENHI
- Specially Promoted Research (26246009)
- Japan Society for the Promotion of Science (15K20959, 12024046)
- Tonen General Sekiyu Research & Development Encouragement Foundation
- Ministry of Education, Culture, Sports, Science, and Technology
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