Nanoscale ferromagnetic rings fabricated by electron-beam lithography
- 15 June 2003
- journal article
- research article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 93 (12), 10011-10013
- https://doi.org/10.1063/1.1577224
Abstract
We have fabricated nanoscale ferromagnetic rings using electron-beam lithography with a lift-off process for pattern transfer. The resist thickness and electron-beam dose were tailored to produce 10 nm thick rings with outer diameters down to 90 nm. Arrays of rings were produced for magneto-optical Kerr effect measurements which show that down to the smallest diameters, reproducible magnetic switching into the flux-closure vortex state is maintained.Keywords
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