Atmospheric pressure gas discharges for surface treatment
- 30 September 1995
- journal article
- Published by Elsevier BV in Surface and Coatings Technology
- Vol. 74-75, 394-398
- https://doi.org/10.1016/0257-8972(95)08325-1
Abstract
No abstract availableKeywords
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- The deposition of thin films of materials with high melting points on substrates at room temperature using the pulse plasma methodThin Solid Films, 1981