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(Ba,Sr)TiO
3
dielectrics for future stacked- capacitor DRAM
Home
Publications
(Ba,Sr)TiO
3
dielectrics for future stacked- capacitor DRAM
(Ba,Sr)TiO
3
dielectrics for future stacked- capacitor DRAM
D. E. Kotecki
D. E. Kotecki
JB
J. D. Baniecki
J. D. Baniecki
HS
H. Shen
H. Shen
RL
R. B. Laibowitz
R. B. Laibowitz
KS
K. L. Saenger
K. L. Saenger
JL
J. J. Lian
J. J. Lian
TS
T. M. Shaw
T. M. Shaw
SA
S. D. Athavale
S. D. Athavale
CC
C. Cabral
C. Cabral
PD
P. R. Duncombe
P. R. Duncombe
MG
M. Gutsche
M. Gutsche
GK
G. Kunkel
G. Kunkel
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1 May 1999
journal article
Published by
IBM
in
IBM Journal of Research and Development
Vol. 43
(3)
,
367-382
https://doi.org/10.1147/rd.433.0367
Abstract
No abstract available
Cited by 180 articles