The depth profile analysis of W-Si-N coatings after thermal annealing
- 2 December 2002
- journal article
- Published by Elsevier BV in Surface and Coatings Technology
- Vol. 161 (2-3), 111-119
- https://doi.org/10.1016/s0257-8972(02)00325-0
Abstract
No abstract availableThis publication has 19 references indexed in Scilit:
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