Positron annihilation spectroscopy of the defect structure of sputter-deposited TiN
- 15 December 1988
- journal article
- Published by Elsevier BV in Surface and Coatings Technology
- Vol. 36 (3-4), 593-603
- https://doi.org/10.1016/0257-8972(88)90002-3
Abstract
No abstract availableKeywords
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