Thermally curable hybrid high refractive index polymer solutions have been developed. These solutions are stable up to 6 months under room temperature storage conditions and can be easily spin-coated onto a desired substrate. When cured at elevated temperature, the hybrid polymer coating decomposes to form a metal oxide-rich film that has a high refractive index. The resulting films have refractive indices higher than 1.90 in the entire visible region and achieve film thicknesses of 300-900 nm depending on the level of metal oxide loading, cure temperature being used, and number of coatings. The formed films show greater than 90% internal transmission in the visible wavelength (400-700 nm). These hybrid high refractive index films are mechanically robust, are stable upon exposure to both heat and UV radiation, and are currently being investigated for microlithographic patterning potential.