Optically interrogated MEMS pressure sensors for propulsion applications
- 1 April 2001
- journal article
- Published by SPIE-Intl Soc Optical Eng in Optical Engineering
- Vol. 40 (4), 598
- https://doi.org/10.1117/1.1354629
Abstract
No abstract availableKeywords
This publication has 14 references indexed in Scilit:
- Integrated optical micromachined pressure sensor with spectrally encoded output and temperature compensation.Applied Optics, 1998
- Micromachined Fabry-Perot cavity pressure transducerIEEE Photonics Technology Letters, 1995
- Integrated optical ring resonator with micromechanical diaphragms for pressure sensingIEEE Photonics Technology Letters, 1994
- Analysis and design of an integrated silicon ARROW Mach-Zehnder micromechanical interferometerJournal of Lightwave Technology, 1994
- Elastooptical properties of SiON layers in an integrated optical interferometer used as a pressure sensorJournal of Lightwave Technology, 1994
- Optical micromachined pressure sensor for aerospace applicationsOptical Engineering, 1992
- All-optical pressure sensor with temperature compensation on resonant PECVD silicon nitride microstructuresElectronics Letters, 1992
- Development of medical pressure and temperature sensors employing optical spectrum modulationIEEE Transactions on Biomedical Engineering, 1991
- Integrated optic pressure sensor on silicon substrateApplied Optics, 1989
- Fiber-linked interferometric pressure sensorReview of Scientific Instruments, 1987