Differences in anisotropic etching properties of KOH and TMAH solutions
- 10 March 2000
- journal article
- Published by Elsevier BV in Sensors and Actuators A: Physical
- Vol. 80 (2), 179-188
- https://doi.org/10.1016/s0924-4247(99)00264-2
Abstract
No abstract availableThis publication has 9 references indexed in Scilit:
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