Squeeze film air damping in MEMS
- 1 May 2007
- journal article
- review article
- Published by Elsevier BV in Sensors and Actuators A: Physical
- Vol. 136 (1), 3-27
- https://doi.org/10.1016/j.sna.2007.01.008
Abstract
No abstract availableKeywords
This publication has 37 references indexed in Scilit:
- Damping of a micro-resonator torsion mirror in rarefied gas ambientJournal of Micromechanics and Microengineering, 2005
- Extending the validity of squeezed-film damper models with elongations of surface dimensionsJournal of Micromechanics and Microengineering, 2005
- Squeeze-film air damping of thick hole-plateSensors and Actuators A: Physical, 2003
- Energy transfer model for squeeze-film air damping in low vacuumJournal of Micromechanics and Microengineering, 2002
- Squeeze film damping effect on the dynamic response of a MEMS torsion mirrorJournal of Micromechanics and Microengineering, 1998
- Modified Reynolds Equation for Ultra-Thin Film Gas Lubrication Using 1.5-Order Slip-Flow Model and Considering Surface Accommodation CoefficientJournal of Tribology, 1993
- On Isothermal Squeeze FilmsJournal of Lubrication Technology, 1983
- Squeeze Film Dampers: Amplitude Effects at Low Squeeze NumbersJournal of Engineering for Industry, 1975
- Miniaturization of Tuning ForksScience, 1968
- A Study of Fluid Squeeze-Film DampingJournal of Basic Engineering, 1966