High critical currents in epitaxial YBa2Cu3O7−x thin films on silicon with buffer layers
- 20 February 1989
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 54 (8), 754-756
- https://doi.org/10.1063/1.101471
Abstract
As‐deposited superconducting thin films (∼0.1 μm) of YBa2Cu3O7−x have been prepared by pulsed laser deposition on (100) Si with buffer layers of BaTiO3/MgAl2O4. X‐ray diffraction studies reveal that the films grow epitaxially with the c axis preferentially oriented normal to the substrate surface. This is confirmed by ion channeling measurements along the (100) (normal to the surface) and (110) directions of the Si substrate showing a minimum yield of 54% along the (100), and 78% along the (110) axes using 2.8 MeV He++. Preliminary transmission electron microscopy study also supports these results. The as‐deposited films have zero resistance temperatures of 86–87 K, and critical current densities of 6×104 A/cm2 at 77 K and 1.2×105 A/cm2 at 73 K. Our results indicate that the superconducting properties of the films are limited primarily by the quality and degree of epitaxal growth of the buffer layers on the silicon substrate.Keywords
This publication has 11 references indexed in Scilit:
- High-temperature superconductivity in ultrathin films of Y1Ba2Cu3O7−xApplied Physics Letters, 1989
- Epitaxial Y-Ba-Cu-O films on Si with intermediate layer by rf magnetron sputteringApplied Physics Letters, 1988
- Low-temperature preparation of superconducting YBa2Cu3O7−δ films on Si, MgO, and SrTiO3 by thermal coevaporationApplied Physics Letters, 1988
- Superconducting Y1Ba2Cu3O7−x films on SiApplied Physics Letters, 1988
- High T c YBa2Cu3O7−x thin films on Si substrates by dc magnetron sputtering from a stoichiometric oxide targetApplied Physics Letters, 1988
- As-deposited superconducting Y-Ba-Cu-O thin films on Si, Al2O3, and SrTiO3 substratesApplied Physics Letters, 1988
- Characterization of thin films of Y-Ba-Cu-O on oxidized silicon with a zirconia buffer layerApplied Physics Letters, 1988
- Thin films of Y-Ba-Cu-O on silicon and silicon dioxideApplied Physics Letters, 1988
- Low-temperature preparation of high T c superconducting thin filmsApplied Physics Letters, 1988
- Epitaxial Growth of PbTiO3 on MgAl2O4/Si SubstratesJapanese Journal of Applied Physics, 1985