Micromachined integrated pressure—thermal sensors on flexible substrates
- 21 August 2006
- journal article
- Published by IOP Publishing in Journal of Micromechanics and Microengineering
- Vol. 16 (10), 1984-1992
- https://doi.org/10.1088/0960-1317/16/10/010
Abstract
No abstract availableKeywords
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