True Atomic Resolution Imaging on Semiconductor Surfaces with Noncontact Atomic Force Microscopy
- 1 January 1996
- journal article
- Published by Springer Science and Business Media LLC in MRS Proceedings
Abstract
The constant vibration mode and the constant excitation mode in noncontact atomic force microscopy were compared to investigate the force interaction between tip and surface. As a result, we found that the constant excitation mode is much more gentle than the constant vibration mode. We also succeeded in atomic resolution imaging on InP(110) surface not only in the noncontact region but in the contact region for the first time. Furthermore, we found the discontinuity of the force gradient curve on reactive Si(111)7×7 reconstructed surface. We proposed a model to explain the discontinuity with the crossover between the physical and chemical bonding interaction.Keywords
This publication has 12 references indexed in Scilit:
- Simultaneous imaging of Si(111) 7×7 with atomic resolution in scanning tunneling microscopy, atomic force microscopy, and atomic force microscopy noncontact modeJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1996
- Atomic resolution in dynamic force microscopy across steps on Si(1 1 1)7×7Zeitschrift für Physik B Condensed Matter, 1996
- Defect Motion on an InP(110) Surface Observed with Noncontact Atomic Force MicroscopyScience, 1995
- Atomically Resolved InP(110) Surface Observed with Noncontact Ultrahigh Vacuum Atomic Force MicroscopeJapanese Journal of Applied Physics, 1995
- Atomic Resolution of the Silicon (111)-(7×7) Surface by Atomic Force MicroscopyScience, 1995
- Ultrahigh vacuum atomic force microscope with sample cleaving mechanismJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1994
- True Atomic Resolution by Atomic Force Microscopy Through Repulsive and Attractive ForcesScience, 1993
- Improved fiber-optic interferometer for atomic force microscopyApplied Physics Letters, 1989
- Atomic Force MicroscopePhysical Review Letters, 1986
- Structural analysis of Si(111)-7×7 by UHV-transmission electron diffraction and microscopyJournal of Vacuum Science & Technology A, 1985