Micro and nano-structurally rich carbon materials are alternatives to conventional metal/silicon tips for field emission sources. In particular, carbon nanotubes exhibit extraordinary field emission properties because of their high electrical conductivity, their high aspect ratio “whisker-like” shape for optimum geometrical field enhancement, and remarkable thermal stability. This paper will review the PECVD growth process, and the microfabrication techniques needed to produce well defined carbon nanotube based micro-electron sources for use in novel parallel e-beam lithography and high frequency microwave amplifier systems.