Etching processes for fabrication of GaN/InGaN/AlN microdisk laser structures

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1 November 1996

journal article
Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures

Vol. 14 (6), 3637-3640
https://doi.org/10.1116/1.588740

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Cited by 16 articles