Low temperature, aerosol-assisted chemical vapor deposition (AACVD) of CdS, ZnS, and Cd1-xZnxS using monomeric single-source precursors: M(SOCCH3)2 TMEDA
- 1 September 1996
- journal article
- research article
- Published by Wiley in Chemical Vapor Deposition
- Vol. 2 (5), 171-174
- https://doi.org/10.1002/cvde.19960020503
Abstract
No abstract availableKeywords
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