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Properties of Plasma‐Deposited Silicon Nitride
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Publications
Properties of Plasma‐Deposited Silicon Nitride
Properties of Plasma‐Deposited Silicon Nitride
HS
H. J. Stein
H. J. Stein
VW
V. A. Wells
V. A. Wells
RH
R. E. Hampy
R. E. Hampy
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1 October 1979
journal article
Published by
The Electrochemical Society
in
Journal of the Electrochemical Society
Vol. 126
(10)
,
1750-1754
https://doi.org/10.1149/1.2128790
Abstract
No abstract available
Cited by 101 articles